Substrate inspection device and method
US9880408B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 17, 2015 |
| Grant date | Jan 30, 2018 |
| Priority date | — |
| Expiry date | Oct 1, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate inspection device and method are disclosed. The substrate inspection device includes a conveyance stage for carrying the substrate on its surface; a region scanning camera located at a first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting standard specification of the substrate; a line scanning camera located at the first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting edge line and size of the substrate; and a light source located at a second side of the conveyance stage opposite to the first side, configured for irradiating light rays onto the substrate, so as to be utilized by the region scanning camera and the line scanning camera for inspecting the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.