Optical inspection station for detecting light-reflecting defects
US9885666B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 24, 2007 |
| Grant date | Feb 6, 2018 |
| Priority date | — |
| Expiry date | Mar 21, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an optical inspection station comprising: an illumination system capable of delivering a series of light beams illuminating an inspection region of the object at various angles of incidence; a camera equipped with a lens for producing images of the inspection region during rotation of the object; and a unit for analyzing and processing the images taken by the camera so as to detect the presence of reflecting defects in the images. According to the invention, the optical inspection station includes a series of optical elements for deflecting, in the air, rays reflected by the inspection region, these being placed between the inspection region and the lens so as to form, in each image, a series of views of the inspection region taken at different angles of viewing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.