Patent · US Active

Prism film and method and apparatus for manufacturing the same

US9885811B2 · kind B2 · utility

0Cited by
2References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 21, 2013
Grant dateFeb 6, 2018
Priority date
Expiry dateAug 8, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/70408
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Embodiments of the present invention provide a prism film and a method and an apparatus for manufacturing the prism film. The prism film comprises a substrate which is provided with prism protrusions formed of photoresist; wherein at least two prism protrusions have different heights. The embodiments of the present invention adopt the laser interference lithography apparatus for forming the prism film, such that the prism film has adjustable prism period and modulation depths. Moreover, the depth of modulation is distributed randomly on the surface of the manufactured prism film, and a prism direction and a prism period can be adjusted conveniently.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.