Thinner compositions
US9885955B2 · kind B2 · utility
1Cited by
8References
3Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jan 11, 2016 |
| Grant date | Feb 6, 2018 |
| Priority date | — |
| Expiry date | Jan 11, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/266
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A thinner composition including an acetate-based compound in an amount in a range of about 30 weight percent to about 70 weight percent, a lactate-based compound in an amount in a range of about 1 weight percent to about 20 weight percent, a propionate-based compound in an amount in a range of about 30 weight percent to about 60 weight percent, and an ether-based additive in an amount in a range of about 10 ppm to about 500 ppm, based on a total amount of the composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.