Ferroelectric ceramics and manufacturing method thereof
US9887348B2 · kind B2 · utility
1Cited by
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2Claims
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Key dates
| Filing date | Feb 12, 2015 |
| Grant date | Feb 6, 2018 |
| Priority date | — |
| Expiry date | Feb 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/708
Abstract
To obtain a piezoelectric film having excellent piezoelectric properties. One aspect of the present invention relates to ferroelectric ceramics including a ZrO2 film oriented in (200), a Pt film that is formed on the ZrO2 film and is oriented in (200) and a piezoelectric film formed on the Pt film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.