Electrode arrangement for generating a non-thermal plasma

US9889218B2 · kind B2 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Gregor Morfill · Birkenfeld, DE
• Bernd Steffes · Garching bei München, DE
• Tetsuji Shimizu · Garching bei München, DE

Key dates

• Filing date: Mar 13, 2009
• Grant date: Feb 13, 2018
• Expiry date: Nov 12, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/2443
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

The invention relates to an electrode arrangement (1) for generating a non-thermal plasma, comprising: a layer-shaped first electrode (2) made of an electrically conductive material, a layer-shaped second electrode (4) made of an electrically conductive material, wherein the second electrode (4) is electrically insulated from the first electrode (2), and a dielectric barrier (3) being arranged between the first electrode (2) and the second electrode (4), so that the non-thermal plasma is generated by a dielectric barrier discharge. The inventive electrode arrangement is characterized in that at least one of the first electrode (2) and the second electrode (4) comprises several perforations which are distributed over the electrode.