Tubular target and production method

US9890451B2 · kind B2 · utility

Assignee

• Plansee SE · AT

Inventors

• Peter Abenthung · Reutte, AT
• Karl Huber · Karlsruhe, DE
• Harald Lackner · Reutte, AT
• Gerhard Leichtfried · Reutte, AT
• Peter Polcik · Reutte, AT
• Christian Weratschnig · Reutte, AT

Key dates

• Filing date: Dec 2, 2011
• Grant date: Feb 13, 2018
• Expiry date: Dec 13, 2033

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C22C1/045
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.