Temperature sensor
US9891117B2 · kind B2 · utility
2Cited by
1References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2013 |
| Grant date | Feb 13, 2018 |
| Priority date | — |
| Expiry date | Oct 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C7/041
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The temperature sensor includes an insulating film; a thin film thermistor portion which is formed on the surface of the insulating film with a thermistor material of TiAlN; the pair of interdigitated electrodes which have a plurality of comb portions and are pattern-formed on the thin film thermistor portion using a metal so as to face each other; and the pair of pattern electrodes which are pattern-formed on the surface of the insulating film and are connected to the pair of interdigitated electrodes, wherein at least a part of each of the pattern electrodes is formed of a conductive resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.