Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufacture
US9891356B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2015 |
| Grant date | Feb 13, 2018 |
| Priority date | — |
| Expiry date | Sep 8, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/708
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device includes spectral purity filters (SPF) and structures for supporting SPF films. The device further includes a monolithic support having a mesh portion and a frame portion and a film overlaying at least a portion of the support. In some cases, the film can be affixed to the support without an adhesive. The monolithic support can be Silicon, stainless steel or some other suitable material and the film can be a single layer spectral purity filter film or a multilayer spectral purity filter film. The mesh portion of the support can include a plurality of through-holes that are formed by etching and/or eroding a thinned material such as silicon or stainless steel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.