Patent · US Active

Locally imaging a structure in a sample at high spatial resolution

US9891417B2 · kind B2 · utility

6Cited by
11References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 21, 2016
Grant dateFeb 13, 2018
Priority date
Expiry dateSep 21, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/58
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

For high spatial resolution imaging a structure in a sample, the structure being marked with luminescence markers, light that has an effect on the emission of luminescence light by the luminescence markers is directed onto the sample with an intensity distribution having a zero point and intensity maxima neighboring the zero point in at least one direction. A scan area which is a part of the sample is scanned with the zero point. Luminescence light emitted out of a local area including the zero point is registered and assigned to the respective location of the zero point in the sample. Dimensions of the scan area, in at least one direction in which the intensity maxima are neighboring the zero point, are limited such that they are not larger than 75% of a distance of the intensity maxima in the at least one direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.