Integrated electro-optic modulator
US9891450B2 · kind B2 · utility
6Cited by
3References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2016 |
| Grant date | Feb 13, 2018 |
| Priority date | — |
| Expiry date | Mar 30, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0151
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An E/O phase modulator may include a waveguide having an insulating substrate, a single-crystal silicon strip and a polysilicon strip of a same thickness and doped with opposite conductivity types above the insulating substrate, and an insulating interface layer between the single-crystal silicon strip and polysilicon strip. Each of the single-crystal silicon strip and polysilicon strip may be laterally continued by a respective extension, and a respective electrical contact coupled to each extension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.