Patent · US Active

Method for forming a suspended lithium-based membrane semiconductor structure

US9893264B2 · kind B2 · utility

1Cited by

5References

32Claims

0Family size

Assignees

CARNEGIE MELLON UNIVERSITY · US
The Trustees of the University of Pennsylvania · US

Inventors

Songbin Gong · Champaign, US
Gianluca Piazza · Lodi, IT

Key dates

Filing date	Jun 14, 2013
Grant date	Feb 13, 2018
Priority date	—
Expiry date	Dec 27, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/877
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.