Patent · US Active

Microelectromechanical system for tuning lasers

US9893491B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Harald Schenk · Dresden, DE
Jan Grahmann · Berlin, DE
Joachim Wagner · Ludwigshafen, DE
Ralf Ostendorf · Gundelfingen, DE
Marcel Rattunde · Gundelfingen, DE

Key dates

Filing date	Jul 29, 2016
Grant date	Feb 13, 2018
Priority date	—
Expiry date	Jul 29, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01S5/02326
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A micromechanically produced optical device includes:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.