Gas sensor with integrated optics and reference cell
US9897537B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2015 |
| Grant date | Feb 20, 2018 |
| Priority date | — |
| Expiry date | Jan 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of fabricating a gas sensor on a substrate and a gas sensor fabricated on a substrate that includes optical and electronic components are described. The method includes fabricating a laser to output light over a range of wavelengths within a waveguide, fabricating a splitter to split the light output by the laser to a reference waveguide and to a detection waveguide, fabricating a reference cell to house the reference waveguide and a reference gas. An output of the reference waveguide is coupled to a first optical detector and an output of the detection waveguide is coupled to a second optical detector to identify or quantify an ambient gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.