Electrically conductive thin films
US9899209B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Sep 30, 2015 |
| Grant date | Feb 20, 2018 |
| Priority date | — |
| Expiry date | Oct 17, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB32B2307/704
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrically conductive thin film including a plurality of nanosheets including a doped titanium oxide represented by Chemical Formula 1 and having a layered crystal structure:(AαTi1−α)O2+δ Chemical Formula 1wherein, in Chemical Formula 1, δ is greater than 0, A is at least one dopant metal selected from Nb, Ta, V, W, Cr, and Mo, and α is greater than 0 and less than 1. Also, an electronic device including the electrically conductive thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.