Patent · US Active

Group III nitride semiconductor, and method for producing same

US9899213B2 · kind B2 · utility

1Cited by
0References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 9, 2017
Grant dateFeb 20, 2018
Priority date
Expiry dateFeb 9, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/02425
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

On an RAMO4 substrate containing a single crystal represented by the general formula RAMO4 (wherein R represents one or a plurality of trivalent elements selected from a group of elements including: Sc, In, Y, and a lanthanoid element, A represents one or a plurality of trivalent elements selected from a group of elements including: Fe(III), Ga, and Al, and M represents one or a plurality of divalent elements selected from a group of elements including: Mg, Mn, Fe(II), Co, Cu, Zn, and Cd), a buffer layer containing a nitride of In and a Group III element except for In is formed, and a Group III nitride crystal is formed on the buffer layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.