Gas distributor used in wafer carriers
US9899246B2 · kind B2 · utility
2Cited by
2References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2015 |
| Grant date | Feb 20, 2018 |
| Priority date | — |
| Expiry date | Oct 8, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86212
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to gas distributors used in wafer carriers. The gas distributors comprise a body having an interior space, a separator configured at the front side of the body in the interior space, and an air inlet connected with the body. One edge of the separator and the front side of the body together form a passage. The configuration of the passage in the gas distributors enables the gas distributors to evenly distribute gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.