Semiconductor device and method for manufacturing the same
US9899395B1 · kind B1 · utility
0Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2016 |
| Grant date | Feb 20, 2018 |
| Priority date | — |
| Expiry date | Jul 26, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/1438
Abstract
A semiconductor device includes a pair of erase gate lines, a pair of control gate lines and a pair of word lines. The pair of control gate lines are disposed on the erase gate lines. Each one of the control gate lines includes a plurality of segments between which portions of one of the pair of erase gate lines are seen in a plan view. In a plan view of the semiconductor device, the pair of word lines are disposed between the control gate lines and extending along edges of the control gate lines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.