Patent · US Active

Miniaturized and ruggedized wafer level MEMs force sensors

US9902611B2 · kind B2 · utility

16Cited by

145References

13Claims

0Family size

Assignee

NextInput, Inc. · US

Inventors

Amnon Brosh · Demarest, US
Ryan Diestelhorst · Atlanta, US
Steven S. Nasiri · Saratoga, US

Key dates

Filing date	Jan 13, 2015
Grant date	Feb 27, 2018
Priority date	—
Expiry date	Jan 13, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0048
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.