Connecting wire
US9904130B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2015 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Feb 27, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/123
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There are provided connecting wires whose reliability may be ensured by preventing leakage between the connecting wires and by preventing entry of moisture. Overexposure is performed by using a mask having a shape of a protruding pattern (55a) with a sharp tip end at a position corresponding to a pattern edge of an organic insulating film (70) between adjacent connecting wires (50). Inclination of an inclined surface of the organic insulating film (70) sandwiched by the connecting wires (50) is thereby made gradual, and thus, at the time of forming the connecting wires (50), a film thickness of a resist may be prevented from becoming thick along an edge line of the organic insulating film (70). As a result, the resist is prevented from remaining in a connected manner at a region sandwiched by the adjacent connecting wires (50), and leakage between the adjacent connecting wires (50) may be prevented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.