Patent · US Active

EUV imaging apparatus

US9904175B2 · kind B2 · utility

0Cited by

0References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jens Kugler · Heubach, DE
Stefan Hembacher · Bobingen, DE
Michaela Schmid · Kaltenbach, CH

Key dates

Filing date	Nov 10, 2015
Grant date	Feb 27, 2018
Priority date	—
Expiry date	Nov 10, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/709
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An EUV imaging apparatus is provided, which includes a reference structure and a first optical element, which is actuatable relative to the reference structure with the aid of a first actuator. The first actuator is a self-holding actuator. The apparatus includes a second optical element, which is actuatable relative to the reference structure a second actuator. The second actuator is a non-self-holding actuator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.