Imprint template and methods thereof
US9905259B2 · kind B2 · utility
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1References
16Claims
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Key dates
| Filing date | Apr 29, 2015 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Nov 12, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/03
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Provided herein is a method, including forming a first template including a first pattern, wherein forming the first template includes self-assembly of diblock copolymers guided by an initial pattern; forming a second template including a second pattern, wherein the second pattern corresponds to a servo pattern; and forming a master template from the first template, wherein the master template includes one or more portions of the first pattern combined with the second pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.