Curved post scan electrode
US9905396B1 · kind B1 · utility
0Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2016 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Oct 18, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/057
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus an ion beam generator to provide an ion beam. A scanning system may receive the ion beam and provide a scanned beam. An electrode may receive the scanned beam. At least a portion of the electrode is normal to a propagation direction of the scanned beam. The portion of the electrode that is normal to the propagation direction the scan beam may have a curved shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.