Method for providing sequential power pulses
US9906210B2 · kind B2 · utility
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2References
8Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 8, 2012 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Feb 23, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3467
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a method for providing power pulses for PVD sputter cathodes which comprise a power consumption component and a cathode element, wherein during a power increase interval for a generator the power on the power consumption component is decreased and then the power on the cathode element is decreased, with changeover being effected such that the power draw from the generator providing the power does not have to be interrupted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.