Nano-aperture fabrication using template guided thermal dewetting
US9909203B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Oct 2, 2015 |
| Grant date | Mar 6, 2018 |
| Priority date | — |
| Expiry date | Dec 1, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/5806
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for fabrication of metal film with nanoapertures is provided. The method includes the steps of providing a nanopatterned template including a plurality of nanostructures, depositing of the metal film onto the nanopatterned template, and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.