Device and method for an interferometric measuring of an object

US9910056B2 · kind B2 · utility

Assignee

• Polytec GmbH · CA

Inventors

• Matthias Schussler · Waldbronn, DE
• Christian Rembe · Waldbronn, DE
• Alexander Drabenstedt · Ettlingen, DE
• Sebastian Boedecker · Karlsruhe, DE
• Thian-Hua Xu · Waldbronn, DE

Key dates

• Filing date: Jan 23, 2017
• Grant date: Mar 6, 2018
• Expiry date: Jan 23, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01H9/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.