Agglutinant for pellicle and a pellicle using it
US9910349B2 · kind B2 · utility
1Cited by
3References
8Claims
0Family size
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Key dates
| Filing date | Feb 8, 2016 |
| Grant date | Mar 6, 2018 |
| Priority date | — |
| Expiry date | Apr 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A pellicle is proposed in which the agglutinant layer which enables the pellicle to adhere to a photomask is doped with a de-foaming agent which depends on a reactive fluorine-modified silicone oil for its anti-foaming performance, and typically such reactive fluorine-modified silicone oil has a vinyl group at both ends of its molecular chain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.