MEMS switch device and method of fabrication
US9911563B2 · kind B2 · utility
3Cited by
12References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2013 |
| Grant date | Mar 6, 2018 |
| Priority date | — |
| Expiry date | May 5, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS switch device including: a substrate layer; an insulating layer formed over the substrate layer; and a MEMS switch module having a plurality of contacts formed on the surface of the insulating layer, wherein the insulating layer includes a number of conductive pathways formed within the insulating layer, the conductive pathways being configured to interconnect selected contacts of the MEMS switch module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.