Method for making a device for detecting electromagnetic radiation comprising a layer of getter material
US9911785B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 28, 2017 |
| Grant date | Mar 6, 2018 |
| Priority date | — |
| Expiry date | Apr 28, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method makes an electromagnetic radiation detecting device including at least one thermal detector with an absorbent membrane suspended above a substrate, intended to be located in a sealed cavity. The method includes depositing, on the substrate, a gettering metallic layer including a metallic material with a gettering effect; depositing a carbonaceous sacrificial layer of amorphous carbon on the gettering metallic layer; depositing at least one sacrificial mineral layer on the carbonaceous sacrificial layer; chemical-mechanical planarization of the sacrificial mineral layer; fabricating the thermal detector so that the absorbent membrane is produced on the sacrificial mineral layer; removing the sacrificial mineral layer; and removing the carbonaceous sacrificial layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.