Hydrogenation of passivated contacts
US9911873B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Aug 11, 2016 |
| Grant date | Mar 6, 2018 |
| Priority date | — |
| Expiry date | Aug 11, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
Methods of hydrogenation of passivated contacts using materials having hydrogen impurities are provided. An example method includes applying, to a passivated contact, a layer of a material, the material containing hydrogen impurities. The method further includes subsequently annealing the material and subsequently removing the material from the passivated contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.