Sensitized, photo-sensitive glass and its production

US9914660B2 · kind B2 · utility

Assignee

• Schott AG · DE

Inventors

• Bianca Schreder · Pocking, DE
• Marten Walther · Engelstadt, DE
• Martin Feichtinger · Delligsen, DE
• Lothar Niessner · Alfeld (Leine), DE
• Carsten Renz · Eschershausen, DE
• Sean Qian · Shanghai, CN
• Junming Xue · Suzhou, CN

Key dates

• Filing date: May 18, 2016
• Grant date: Mar 13, 2018
• Expiry date: May 18, 2036

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C2204/00
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A sensitized, photo-structurable glasses and methods for producing are provided. The glasses includes Si4+, one or more crystal-agonist, one or more crystal-antagonist, and one or more pair of nucleating agents. The glasses are sensitized in that the glass reacts more sensitive to irradiation with UV-light and can be crystallized easier and with higher aspect ratios than a non-sensitized glass with equal composition. Furthermore, the sensitized glasses of this invention have smaller crystal sizes after irradiation and tempering than a non-sensitized glass with equal composition. The invention also relates to a structured glass product. Such product can be obtained by submitting the crystallized glass product to a subsequent etching step. The structured product can be used in components or as component for the application fields micro-technology, micro-reaction-technology, electronic packaging, micro-fluidics, FED spacer, bio-technology, interposer, and/or three-dimensional structured antennae.