Method of detecting whether microelectromechanical system device is hermetic
US9915679B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Apr 8, 2016 |
| Grant date | Mar 13, 2018 |
| Priority date | — |
| Expiry date | Nov 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.