Thin film transistor, array substrate, their manufacturing methods, and display device
US9917157B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Oct 9, 2015 |
| Grant date | Mar 13, 2018 |
| Priority date | — |
| Expiry date | Oct 9, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D99/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides a TFT, an array substrate, their manufacturing method, and a display device. The method for manufacturing the TFT includes a step of forming a pattern of a semiconductor active layer on a transparent substrate through a patterning process, and the pattern of the semiconductor active layer includes a lanthanum boride pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.