Patent · US Active

Thermopile temperature sensor field of view narrowing using integrated light blocking layer and lens

US9917242B2 · kind B2 · utility

5Cited by
3References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 25, 2015
Grant dateMar 13, 2018
Priority date
Expiry dateFeb 16, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J2005/065
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor device, a sensor package, and method for fabricating a sensor device are described that include an integrated light blocker disposed on the thermopile device and a lens configured to direct light to the thermopile device. In an implementation, the thermopile device includes a substrate; a thermopile membrane disposed on the substrate, the thermopile membrane including at least one passivation layer; a thermopile disposed within the thermopile membrane, the thermopile including at least one thermocouple; and a light blocking layer disposed proximate to the thermopile membrane, the light blocking layer including an aperture disposed proximate to the thermopile.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.