System for loading and unloading cassette and method for loading and unloading cassette
US9919878B2 · kind B2 · utility
Assignees
Inventor
Key dates
| Filing date | Oct 14, 2015 |
| Grant date | Mar 20, 2018 |
| Priority date | — |
| Expiry date | Oct 14, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1303
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The embodiment of the present disclosure relates to a system and a method for loading and unloading a cassette. The system comprises: a lifting device vertically moving between a first height and a second height; a first conveying device in the lifting device to move the cassette horizontally; a second conveying device to move the cassette in horizontally; a third conveying device to move the cassette horizontally, a plurality of first position sensors to detect a position of the lifting device; and a control device to control vertical movements of the lifting device, and adjust further movements of the first conveying device in the lifting device based on an initial stop position of the lifting device such that the first conveying device is aligned with the second conveying device at the first height, or is aligned with the third conveying device at the second height.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.