Methods of preparing nanodevices

US9919921B2 · kind B2 · utility

Assignees

• The Regents of the University of Colorado, a Body Corporate · US
• DRS Network & Imaging Systems, LLC · US

Inventors

• Victor M. Bright · Boulder, US
• Steven M. George · Boulder, US
• Joseph J. Brown · Boulder, US
• Nathan T. Eigenfeld · Boulder, US
• Jason M. Gray · Hillsboro, US
• George D. Skidmore · Richardson, US

Key dates

• Filing date: Jan 26, 2015
• Grant date: Mar 20, 2018
• Expiry date: Jul 18, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The present invention relates to novel nano- and micro-electromechanical devices and novel methods of preparing them. In one aspect, the invention includes methods of preparing a nanodevice. In certain embodiments, the methods comprise coating a polymer layer with a first at least one thin solid material layer using atomic layer deposition (ALD), thus forming an ALD-generated layer. In other embodiments, the methods comprise patterning the first at least one thin solid material layer to form a nanodevice. In yet other embodiments, the methods comprise releasing the nanodevice from the polymer layer.