Active airbearing device
US9920790B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2014 |
| Grant date | Mar 20, 2018 |
| Priority date | — |
| Expiry date | Apr 2, 2034 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2322/39
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The present invention discloses an active airbearing device, including a airbearing body, a gas film active adjusting unit, a support body detection unit and a drive control unit, wherein the support body detection device measures a state of airbearing, the drive control system generates a control signal according to a detection signal, drives and controls the gas film active adjusting device to generate an active action, and dynamically adjusts the form of gas films on a airbearing surface, so as to dynamically adjust pressure distribution of gaps between the gas films of the airbearing device, thereby improving dynamic stiffness characteristics of the airbearing. Through the present invention, the dynamic stiffness characteristics of the airbearing can be improved significantly, and the purpose of stabilizing the airbearing is achieved; in addition, the active airbearing device according to the present invention also has the characteristics of a compact structure, convenient operation and control, and high precision, and thus is especially suitable for occasions such as ultra-precision machining or high speed spindle which has high requirements for dynamic stiffness of support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.