Sensor and method for manufacturing a sensor

US9921175B2 · kind B2 · utility

Assignee

• Heinrich-Heine-Universitat Dusseldorf · DE

Inventors

• Klaus Schierbaum · Krefeld, DE
• Mhamed El Achhab · Mülheim an der Ruhr, DE
• Christiane Schüle · Mülheim an der Ruhr, DE

Key dates

• Filing date: Oct 10, 2012
• Grant date: Mar 20, 2018
• Expiry date: Feb 3, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/26
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention refers to a sensor (10) having a layer arrangement (12), wherein the layer arrangement (12) comprises at least a base layer (14), a middle layer (16) and an outer layer (18), wherein the middle layer (16) is arranged at least partly upon and in contact with the base layer (14) and wherein the outer layer (18) is arranged at least partly upon and in contact with the middle layer (16), wherein the base layer (14) comprises a metal, wherein the middle layer (16) comprises a metal oxide, and wherein the outer layer (18) is porous and comprises a material selected from the group comprising electrically conductive carbon compounds such as, more particularly, graphite or carbon nanotubes (CNTs), organic electrical conductors and base metals, and wherein electrical contacts can be formed with the base layer (14) and outer layer (18) for a conductivity measurement and/or a resistance measurement. Such a sensor (10) provides a high sensitivity with a high selectivity already at ambient temperature and is furthermore producible especially cost-saving. The present invention further refers to a method for producing a sensor (10). The present invention further refers to the…