Patent · US Active

Auto-alignment of backer plate for direct docking test boards

US9921268B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Eberhard Dengler · Eppelheim, DE
Gabriele Kuczera · Eppelheim, DE
Eckhard Kunigkeit · Stuttgart, DE
Siegfried Tomaschko · Neustadt, DE
Quintino L. Trianni · Balingen, DE

Key dates

Filing date	Nov 18, 2015
Grant date	Mar 20, 2018
Priority date	—
Expiry date	Apr 14, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2887
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A test probe aligner for aligning a test probe card with devices under test of a wafer is provided. The test probe aligner includes a backer plate arranged with its bottom side to the test probe card, and a stiffener mounted to the test probe card outside a horizontal dimension of the backer plate. The stiffener and a top side of the backer plate end in a same plane above the test probe card. The alignment further includes a bridge beam locked to a top side of the stiffener. Furthermore, the test probe aligner also includes at least two actuators and at least two corresponding force measurement sensors below a top surface of the bridge beam, arranged such that forces are applicable to the test probe card.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.