X-Y table with a position-measuring device

US9921468B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Wolfgang Holzapfel · Obing, DE
• Joerg Drescher · Riedering, DE
• Markus Meissner · Teupitz, DE
• Ralph Joerger · Traunstein, DE
• Bernhard Musch · Otterfing, DE
• Thomas Kaelberer · Schrobenhausen, DE

Key dates

• Filing date: Oct 12, 2016
• Grant date: Mar 20, 2018
• Expiry date: Oct 12, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70775
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An X-Y table with a position-measuring device includes a table which is disposed on a support and is movable on the support so that altogether the table is positionable in a plane parallel to an underlying stationary base. Two groups of scanning heads are disposed on the support. For position measurement in two directions, a respective one of the scanning heads directs light through a respective transmissive scale attached along an edge of the table such that a respective reflective scale, which is stationary relative to a processing tool disposed above the table, reflects the light through the respective transmissive scale back to the respective scanning head. In a central position of the table, the two groups are in positional correspondence with the transmissive scales, and, in either of two edge positions of the table, only one of the two groups is in positional correspondence with the transmissive scales.