Patent · US Active

Magnetic nanomechanical devices for stiction compensation

US9926193B2 · kind B2 · utility

0Cited by

3References

26Claims

0Family size

Assignee

Intel Corporation · US

Inventors

Jorge Munoz · Hillsboro, US
Dmitri E. Nikonov · معلمی نژاد, US
Kelin J. Kuhn · Beaverton, US
Patrick Theofanis · Pasadena, US
Chytra Pawashe · Portland, US
Kevin Lin · Beaverton, US
Seiyon Kim · Portland, US

Key dates

Filing date	Jun 27, 2014
Grant date	Mar 27, 2018
Priority date	—
Expiry date	Jun 27, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/938
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Nanoelectromechanical (NEMS) devices having nanomagnets for an improved range of operating voltages and improved control of dimensions of a cantilever are described. For example, in an embodiment, a nanoelectromechanical (NEMS) device includes a substrate layer, a first magnetic layer disposed above the substrate layer, a first dielectric layer disposed above the first magnetic layer, a second dielectric disposed above the first dielectric layer, and a cantilever disposed above the second dielectric layer. The cantilever bends from a first position to a second position towards the substrate layer when a voltage is applied to the cantilever.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.