Method for testing the functionality of a rotation rate sensor
US9927240B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 24, 2015 |
| Grant date | Mar 27, 2018 |
| Priority date | — |
| Expiry date | May 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for testing the functionality of a rotation rate sensor, the rotation rate sensor including a substrate and a micromechanical structure oscillatory with respect to the substrate having a first drive element, a second drive element and at least one Coriolis element, the Coriolis element being excitable to at least one oscillation mode by the first drive element and/or by the second drive element, a detection signal being detected as a function of a force action to be detected on the Coriolis element, the rotation rate sensor being operable optionally in a normal mode or in a self-test mode, the first drive element and the second drive element being driven in the normal mode, characterized in that in the self-test mode, the first drive element or the second drive element is driven optionally exclusively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.