Gravimetric gas sensor having a lowered detection limit

US9927401B2 · kind B2 · utility

Assignees

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR
• Apix Analytics

Inventors

• Muriel Matheron · Chambéry, FR
• Regis Barattin · Grenoble, FR
• Vincent Jousseaume · Meylan, FR
• Florence Ricoul · Saint-Égrève, FR

Key dates

• Filing date: Dec 24, 2014
• Grant date: Mar 27, 2018
• Expiry date: Feb 13, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/0427
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A gravimetric detector including a nanoelectronic structure including: a fixed part, at least one part suspended from the fixed part, an excitation device to vibrate the suspended part relative to the fixed part, a detector to detect variations in vibration of the suspended part, and a porous functionalization layer at least partially covering the suspended part, porosity of the functionalization layer being between 3% and 50%.