Optical interferometer device tolerant to inaccuracy in doping overlay
US9927677B2 · kind B2 · utility
0Cited by
8References
18Claims
0Family size
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Key dates
| Filing date | Jun 10, 2016 |
| Grant date | Mar 27, 2018 |
| Priority date | — |
| Expiry date | Jun 10, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/215
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical interferometer device is provided including a waveguide interferometer. The waveguide interferometer includes first and second waveguide arms in a waveguide plane, each waveguide arm including a n-type region and a p-type region forming a junction. The n-type region and the p-type region of the second waveguide arm are translationally symmetric with respect to the n-type region and the p-type region, respectively, of the first waveguide arm in the waveguide plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.