Patent · US Active

Polymers of maleimide and cycloolefinic monomers as permanent dielectric materials

US9932432B2 · kind B2 · utility

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2References
20Claims
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Key dates

Filing dateMay 6, 2016
Grant dateApr 3, 2018
Priority date
Expiry dateMay 6, 2036

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC08G2261/3325
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Various cycloolefinic/maleic anhydride/maleimide polymers and compositions thereof useful for forming self-imageable films encompassing such polymers are disclosed. Such polymers encompass norbornene-type repeating units, maleimide repeat units and maleic anhydride-type repeating units where at least some of such maleic anhydride-type repeating units have been ring-opened. The films formed from such polymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.