Interferometric distance measuring arrangement for measuring surfaces and corresponding method with emission of at least two parallel channels
US9933245B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 18, 2013 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | Nov 4, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an interferometric distance measuring arrangement for measuring surfaces, with at least one laser source, which can be tuned, with a coherence length for generating measurement radiation modulated by a wave length ramp, an optical beam path with an optical transmitting system for emitting the measurement radiation to the surface and an optical capturing system for capturing the measurement radiation back-scattered by the surface, comprising a measuring arm and a reference arm and a radiation detector and an evaluation unit for determining the distance from a reference point of the distance measuring device to the surface. Channels are defined by at least one beamsplitter n≥2 for the parallel emission of measurement radiation, respectively one different sub area of the measurement range defined by the coherence length is allocated to the channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.