Device for detecting radiation including an encapsulating structure having an improved mechanical strength
US9933309B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2016 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | Mar 9, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting electromagnetic radiation is provided, including a substrate; a matrix of thermal detectors disposed on the substrate; and a structure encapsulating the matrix of thermal detectors, including an encapsulating layer extending continuously around and above the matrix of thermal detectors so as to define with the substrate a cavity in which the matrix of thermal detectors is disposed, the encapsulating layer including at least one internal bearing section, which bears directly against the substrate between two adjacent thermal detectors of said matrix, said at least one internal bearing section including a sidewall and a peripheral wall, the sidewall being separate from the peripheral wall in a plane parallel to a plane of the substrate, and the peripheral wall encircling the matrix of thermal detectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.