Sensor device

US9933495B2 · kind B2 · utility

Assignee

• TDK—Micronas GmbH · DE

Inventors

• Timo Kaufmann · Denzlingen, DE
• Joerg Franke · Bruchsal, DE
• Andreas Ring · Glückstadt, DE

Key dates

• Filing date: Mar 31, 2015
• Grant date: Apr 3, 2018
• Expiry date: Jun 26, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/07
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor device for suppressing a magnetic stray field, having a semiconductor body, a first pixel cell and a second pixel cell integrated into a surface of the semiconductor body together with a circuit arrangement. Each pixel cell has a first magnetic field sensor and a second magnetic field sensor to detect a magnetic field in the x-direction and a magnetic field in the y-direction. The first pixel cell is spaced apart from the second pixel cell along a connecting line, and the substrate and the semiconductor body are disposed in the same IC package. A magnet is provided that has a planar main extension surface in the direction of an x-y plane and has a magnetization with four magnetic poles in the direction of the x-y plane. The IC package is spaced apart from the main extension surface of the magnet in the z-direction and at least partially within a ring magnet.