Patent · US Active

Semiconductor memory device

US9935108B2 · kind B2 · utility

0Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 30, 2016
Grant dateApr 3, 2018
Priority date
Expiry dateNov 25, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/63
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor memory device includes stacks on a substrate, each of the stacks including word lines stacked on the substrate and first and second string selection lines laterally spaced apart from each other, vertical pillars passing through the stacks, and first and second bit lines extending longitudinally in a first direction and alternatingly arranged in a second direction crossing the first direction. In a plan view, at least two adjacent ones of the first bit lines in the second direction and at least one of the second bit lines overlap each vertical pillar. A distance between a center of the vertical pillar and one of the first bit lines is different from that between the center of the vertical pillar and another of the first bit lines.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.