Article comprising a photodiode-side integrated fuse for avalanche photodetector focal plane array pixels and method therefor
US9935138B2 · kind B2 · utility
1Cited by
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20Claims
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Key dates
| Filing date | Dec 27, 2016 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | Dec 27, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/11
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A scalable fuse design for individual pixels of a focal plane array of photodiodes comprises a fuse disposed on the upper surface of each photodiode in the array, wherein the fuse is situated proximal to a side of each photodiode. The fuse of each photodiode is electrically coupled to the active region thereof via a first bus and is electrically coupled to an ROIC via a second bus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.